PhysicsCleanRoomParticleCountLog

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Definitions

According to http://www.set3.com/standards.html

Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.

Clas maximum particles/m³
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 352,000 83,200 2,930

The clean room using the same above particle counts.

PCR specific

The Physics clean room is about 200 [math]m^3[/math]

Clas Counts
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 70,400,000 83,200 2,930


The average and SD are calculated by taking 5 minute measurements 5 times.

Date Counts
≥0.3 µm ≥0.5 µm ≥5 µm
Goal 79,400,000 16,640,000 586,000
8/11/11 6040 [math]\pm[/math] 2532 914 [math]\pm[/math] 491 33[math]\pm[/math] 34


Measurements in ISO mode

Date maximum particles/m³
≥0.5 µm ≥5 µm comment
Goal 352,000 2,930
8/12/11 1,480 0
8/16/11 12,100 1,700 drapes have been open over weekend (painting floor)
8/21/11 4,240 283

Measurements in Single mode

Since 0.3 µm measurements are not a required measurement for Class 10,000, they are not included here.

August

maximum particles/m³
Morning Evening
Date ≥0.5 µm ≥5 µm ≥0.5 µm ≥5 µm Comments
Goal 352,000 2,930 352,000 2,930
8/21/11 6,990 353 25,000 3,880
8/22/11 33,400 3,770 35,800 3,770
8/23/11 9,300 353 38,100 3,770
8/24/11 19,100 824 10,700 1,650
Turned on Clean room in the afternoon of 8/23/11

September

maximum particles/m³
Morning Evening
Date ≥0.5 µm ≥5 µm ≥0.5 µm ≥5 µm Comments
Goal 352,000 2,930 352,000 2,930
9/24/11 83,700 6,950 45,200 4,940
9/25/11 23,100 2,120 45,200 4,360
9/26/11 22,800 2,240 5,300 118
9/27/11 1,060 235 25,800 2,710 Adjustments to the chamber were being made within an hour of taking the evening particle count, this required the curtains being opened frequently
9/28/11 1,180 0 7,060 471
9/29/11 19,100 1,530 12,600 1,180
9/30/11 10,100 824 4,470 471 a concrete floor in the next room was cut before noon today (perhaps last night between 5pm and 10 pm)

October

maximum particles/m³
Morning Evening
Date ≥0.5 µm ≥5 µm ≥0.5 µm ≥5 µm Comments
Goal 352,000 2,930 352,000 2,930
10/3/11 14,200 1,180 18,200 353 Snap fasteners were being installed late this afternoon to close gaps in our clean room wall
10/4/11 8,120 824 9,060 824
10/5/11 2,240 353 1,410 0
10/6/11 3,300 353 3,060 118
10/7/11 824 118 6,710 235
10/10/11 4,000 118 2,240 118
10/11/11 1,650 235 2,830 118
10/12/11 1,530 0 1,060 235
10/13/11 2,240 353 5,060 118
10/14/11 7,300 589 4,830 235
10/17/11 4,830 235 15,300 471
10/18/11 4,710 353 5,530 235
10/19/11 8,710 353 4,120 235
10/20/11 6,710 589 24,700 1,180 They were cutting concrete in the adjacent room
10/21/11 4,360 353 3,770 235
10/22/11 3,180 235 5,410 118
10/24/11 6,590 118 11,900 283 The construction crew was digging outside and installing duct work in the adjacent rooms
10/25/11 11,100 0 2,830 353
10/26/11 3,060 0 7,180 353 New pre-filters were installed last night
10/27/11 942 0 5,410 353
10/28/11 6,950 942 4,940 118
10/31/11 3,060 0 4,360 0

November

maximum particles/m³
Morning Evening
Date ≥0.5 µm ≥5 µm ≥0.5 µm ≥5 µm Comments
Goal 352,000 2,930 352,000 2,930
11/1/11 942 118 8,360 471
11/2/11 1,880 118 1,180 118
11/3/11 824 0 7,890 118
11/4/11 0 0 5,890 118 The morning values are not a typo
11/5/11 12,900 1,060 2,000 0
11/6/11 1,650 353 1,650 0
11/7/11 4,240 0 8,830 235
11/8/11 4,710 2,350 471 118 The morning 5.0 µm counts were high, but still under class 10,000 specifications
11/9/11 2,000 118 3,410 353
11/10/11 1,650 0 13,800 1,060
11/11/11 2,240 118 1,410 235
11/14/11 1,410 0 2,240 118
11/15/11 2,240 235 2,940 118
11/16/11 1,060 118 2,000 235
11/17/11 3,650 235 2,240 353
11/18/11 589 0 2,120 118
11/19/11 2,000 235
11/21/11 5,180 235 1,180 0
11/22/11 4,120 353 6,830 235
11/23/11 471 235 824 235
11/28/11 235 0 1,650 0
11/29/11 3,530 118 6,120 235
11/30/11 1,530 0 4,830 235


CLAS12_R1