Difference between revisions of "PhysicsCleanRoomParticleCountLog"

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| Date|| colspan="2" align="center" | '''maximum particles/m³'''
 
| Date|| colspan="2" align="center" | '''maximum particles/m³'''
 
|-
 
|-
| || ≥0.5 µm|| ≥5 µm
+
| || ≥0.5 µm|| ≥5 µm || comment
 
|-
 
|-
|8/12/11  || 1480 || 0
+
|8/12/11  || 1480 || 0 ||
 +
|-
 +
|8/16/11  || 12100 || 1700|| drapes have been open over weekend (painting floor)
 
|}
 
|}

Revision as of 18:22, 16 August 2011

According to http://www.set3.com/standards.html

Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.

Clas maximum particles/m³
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 352,000 83,200 2,930

The clean room using the same above particle counts.


The Physics clean room is about 200 [math]m^3[/math]

Clas Counts
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 70,400,000 83,200 2,930


The average and SD are calculated by taking 5 minute measurements 5 times.

Date Counts
≥0.3 µm ≥0.5 µm ≥5 µm
Goal 79,400,000 16,640,000 586,000
8/11/11 6040 [math]\pm[/math] 2532 914 [math]\pm[/math] 491 33[math]\pm[/math] 34


Measurements in ISO mode

Date maximum particles/m³
≥0.5 µm ≥5 µm comment
8/12/11 1480 0
8/16/11 12100 1700 drapes have been open over weekend (painting floor)