PhysicsCleanRoomParticleCountLog

Definitions

According to http://www.set3.com/standards.html

Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.

Clas		maximum particles/m³
ISO-146441	Federal Standard 209E	≥0.3 µm	≥0.5 µm	≥1 µm	≥5 µm
ISO-6	1,000	102,000	35,200	8,320	293
ISO-7	10,000		352,000	83,200	2,930

The clean room using the same above particle counts.

PCR specific

The Physics clean room is about 200 [math]m^3[/math]

Clas		Counts
ISO-146441	Federal Standard 209E	≥0.3 µm	≥0.5 µm	≥1 µm	≥5 µm
ISO-6	1,000	102,000	35,200	8,320	293
ISO-7	10,000		70,400,000	83,200	2,930

The average and SD are calculated by taking 5 minute measurements 5 times.

Date	Counts
	≥0.3 µm	≥0.5 µm	≥5 µm
Goal	79,400,000	16,640,000	586,000
8/11/11	6040 [math]\pm[/math] 2532	914 [math]\pm[/math] 491	33[math]\pm[/math] 34

Measurements in ISO mode

Date	maximum particles/m³
	≥0.5 µm	≥5 µm	comment
Goal	352,000	2,930
8/12/11	1,480	0
8/16/11	12,100	1,700	drapes have been open over weekend (painting floor)
8/21/11	4,240	283

Measurements in Single mode

Since 0.3 µm measurements are not a required measurement for Class 10,000, they are not included here.

August

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
8/21/11	6,990	353	25,000	3,880
8/22/11	33,400	3,770	35,800	3,770
8/23/11	9,300	353	38,100	3,770
8/24/11	19,100	824	10,700	1,650

Turned on Clean room in the afternoon of 8/23/11

September

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
9/24/11	83,700	6,950	45,200	4,940
9/25/11	23,100	2,120	45,200	4,360
9/26/11	22,800	2,240	5,300	118
9/27/11	1,060	235	25,800	2,710	Adjustments to the chamber were being made within an hour of taking the evening particle count, this required the curtains being opened frequently
9/28/11	1,180	0	7,060	471
9/29/11	19,100	1,530	12,600	1,180
9/30/11	10,100	824	4,470	471	a concrete floor in the next room was cut before noon today (perhaps last night between 5pm and 10 pm)

October

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
10/3/11	14,200	1,180	18,200	353	Snap fasteners were being installed late this afternoon to close gaps in our clean room wall
10/4/11	8,120	824	9,060	824
10/5/11	2,240	353	1,410	0
10/6/11	3,300	353	3,060	118
10/7/11	824	118	6,710	235
10/10/11	4,000	118	2,240	118
10/11/11	1,650	235	2,830	118
10/12/11	1,530	0	1,060	235
10/13/11	2,240	353	5,060	118
10/14/11	7,300	589	4,830	235
10/17/11	4,830	235	15,300	471
10/18/11	4,710	353	5,530	235
10/19/11	8,710	353	4,120	235
10/20/11	6,710	589	24,700	1,180	They were cutting concrete in the adjacent room
10/21/11	4,360	353	3,770	235
10/22/11	3,180	235	5,410	118
10/24/11	6,590	118	11,900	283	The construction crew was digging outside and installing duct work in the adjacent rooms
10/25/11	11,100	0	2,830	353
10/26/11	3,060	0	7,180	353	New pre-filters were installed last night
10/27/11	942	0	5,410	353
10/28/11	6,950	942	4,940	118
10/31/11	3,060	0	4,360	0

November

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
11/1/11	942	118	8,360	471
11/2/11	1,880	118	1,180	118
11/3/11	824	0	7,890	118
11/4/11	0	0	5,890	118	The morning values are not a typo
11/5/11	12,900	1,060	2,000	0
11/6/11	1,650	353	1,650	0
11/7/11	4,240	0	8,830	235
11/8/11	4,710	2,350	471	118	The morning 5.0 µm counts were high, but still under class 10,000 specifications
11/9/11	2,000	118	3,410	353
11/10/11	1,650	0	13,800	1,060
11/11/11	2,240	118	1,410	235
11/14/11	1,410	0	2,240	118
11/15/11	2,240	235	2,940	118
11/16/11	1,060	118	2,000	235
11/17/11	3,650	235	2,240	353
11/18/11	589	0	2,120	118
11/19/11	2,000	235
11/21/11	5,180	235	1,180	0
11/22/11	4,120	353	6,830	235
11/23/11	471	235	824	235
11/28/11	235	0	1,650	0
11/29/11	3,530	118	6,120	235
11/30/11	1,530	0	4,830	235

December

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
12/1/11	706	0	5,180	589
12/2/11	1,180	118	1,180	118
12/3/11	1,650	471
12/5/11	118	0	3,060	0
12/6/11	2,470	235	5,180	589
12/7/11	5,530	0	3,880	118
12/8/11	2,240	0	10,500	942
12/9/11	1,530	118	5,060	471
12/12/11	9,530	471	4,120	353
12/13/11	4,830	353	7,420	589
12/14/11	1,770	118	13,100	824
12/15/11			942	235	The large roll up doors were installed earlier today.
12/19/11	6,000	118	8,000	118
12/20/11	26,700	1,180	2,590	0
12/21/11	824	235	7,300	235
12/22/11	2,470	353	4,360	235
12/23/11	1,530	235	2,120	0

January

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
1/3/12	1,290	118	4,470	589
1/4/12	3,180	235	1,880	0
1/5/12	2,240	235	3,530	235
1/6/12	2,470	471	2,590	0
1/9/12	1,880	471	4,000	118
1/10/12	5,180	471	1,650	0
1/11/12	8,830	706	3,060	471
1/12/12	2,590	118	9,060	706
1/13/12	2,000	118	5,890	353
1/17/12	1,410	0	824	118
1/18/12	2,240	0	2,350	0
1/19/12	8,590	1,530	2,470	118
1/20/12	5,300	235	2,940	235
1/23/12	6,830	706	4,000	942
1/24/12	2,350	353	20,500	1,180
1/25/12	1,880	235	12,100	706
1/26/12	33,900	3,060	2,710	471
1/27/12	4,590	353	3,880	706
1/30/12	1,290	353	2,350	235
1/31/12	11,200	1,290	235	0

February

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
2/1/12	2,710	471	2,000	118
2/2/12	9,060	471	5,890	706
2/3/12	9,180	824	4,590	1,650
2/6/12	13,900	1,180	10,600	589
2/7/12	5,530	118	15,300	824
2/9/12			4,000	471
2/14/12	16,400	1,180	14,200	5,770
2/15/12	1,180	118	12,600	1,650
2/16/12	7,420	1,060	39,800	4,830
2/17/12	7,180	824	6,000	7,060
2/21/12	11,700	471	1,180	118
2/22/12	2,350	118	10,000	1,290
2/23/12	21,300	589	10,100	706
2/24/12	5,890	824	37,800	3,180
2/27/12	11,700	2,240	12,600	706
2/28/12	7,300	1,180	8,830	353
2/29/12	3,530	235	3,720	389

March 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
3/01/12	17,800	1,770	39,200	2,940
3/02/12	6,710	353	33,200	7,530
3/05/12	3,300	942	11,100	1,770
3/06/12	9,060	1,770	20,800	3,060
3/07/12	32,210	2,120	49,000	4,940
3/08/12	56,300	8,120	61,300	8,890
3/09/12	10,500	2,470	6,500	1,100
3/12/12	7,530	1,060	52,700	2,940
3/13/12	26,000	4,590	2,120	118
3/14/12	34,500	4,590	53,900	5,180
3/15/12	4,120	235	8,710	824
3/16/12	1,410	471	7,890	1,290
3/19/12	9,180	353	17,000	1,530
3/20/12	2,830	471	3,650	452
3/21/12	4,510	558	19,300	1,180
3/22/12	11,100	1,770	12,100	942
3/23/12	5,650	589	1,770	471
3/26/12	3,530	218	2,120	314
3/27/12	2,940	353	14,600	1,650
3/28/12	1,900	239	10,040	1,530
3/29/12	13,700	942	4,710	706
3/30/12	36,600	1,400	9,300	471

April 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
4/02/12	3,180	471	56,600	2,830
4/03/12	1,180	235	3,180	235
4/04/12	706	118	7,420	824
4/05/12	13,200	1,180	1,650	235
4/06/12	2,710	589	26,500	1,370
4/09/12	1,650	235	2,350	118
4/10/12	7,530	353	8,590	471
4/11/12	5,690	129	8,480	353
4/12/12	1,180	235	6,120	471
4/13/12	2,710	353	1,170	942
4/16/12	2,480	589	11,500	471
4/17/12	2,350	591	4,590	471
4/18/12	8,120	706	3,410	482
4/19/12	2,510	445	13,500	942
4/20/12	1,290	353	4,120	235
4/23/12	8,000	706	8,360	727
4/24/12	8,410	589	4,360	353
4/25/12	2,020	224	6,360	824
4/26/12	9,060	1,180	4,940	353
4/27/12	6,240	471	9,180	589
4/30/12	1,770	235	4,360	265

CLAS12_R1

May 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
5/1/12	5,890	471	2,240	482
5/2/12	7,410	589	13,500	353
5/3/12	3,300	489	8,240	400
5/4/12	6,470	1,410	6,710	589
5/7/12	1,180	118	3,880	471
5/8/12	5,890	353	5,300	118
5/9/12	7,180	471	5,180	824
5/10/12	2,950	318	2,350	353
5/11/12	7,300	353	3,880	329
5/14/12	5,180	706	4,830	353
5/15/12	1,650	118	4,360	118
5/16/12	4,680	853	2,830	235
5/17/12	1,060	589	2,240	351
5/18/12	1,290	118	3,650	435
5/21/12	1,980	128	824	235
5/22/12	5,650	353	9,770	824
5/23/12	2,830	118	1,650	706
5/24/12	1,680	148	3,650	118
5/25/12	3,060	471	10,200	706
5/29/12	6,000	706	9,770	1060
5/30/12	6,240	353	4,470	353
5/31/12	706	235	1,060	128

CLAS12_R1

June 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
6/1/12	3,770	353	3,880	353
6/4/12	2,120	353	1,880	235
6/5/12	3,180	471	3,300	118
6/6/12	1,290	235	2,590	218
6/7/12	3,770	471	4,000	353
6/8/12	2,710	118	2,240	589
6/11/12	3,880	589	15,200	1,650
6/12/12	3,770	353	10,700	1,180
6/13/12	2,350	118	1,650	235
6/14/12	1,770	118	4,830	942
6/15/12	2,710	235	5,650	824
6/18/12	4,000	706	5,180	706
6/19/12	7,420	589	2,710	235
6/20/12	4,240	353	9,300	1,060
6/21/12	2,940	589	4,000	589
6/25/12	4,240	471	3,410	353
6/26/12	2,830	353	2,830	118
6/27/12	1,020	106	25,200	2,000
6/28/12	2,590	118	10,400	1,060

July 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
7/2/12	2,710	589	9,530	353
7/3/12	2,590	235	3,770	589
7/5/12	3,410	589	11,800	235
7/9/12	3,300	471	3,410	706
7/11/12	2,590	353	7,530	942
7/12/12	3,410	235	5,410	706
7/16/12	7,300	1,060	4,590	706
7/17/12	3,060	118	6,830	824
7/18/12	2,350	118	6,240	942
7/19/12	2,000	589	6,590	824
7/23/12	3,180	824	1,530	235
7/24/12	3,060	706	26,700	706
7/25/12	3,530	589	3,650	235
7/26/12	4,120	471	5,890	1,060
7/30/12	3,770	353	3,650	235
7/31/12	3,650	235	4,240	1,410

CLAS12_R1

August 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
8/1/12	2,350	235	4,710	589
8/2/12	2,710	118	2,590	118
8/6/12	7,530	1,410	2,240	589	AM reading high. Ran again at 11:30, 2000 and 118
8/7/12	3,650	471	4,470	471
8/8/12	5,410	824	4,710	706
8/9/12	3,880	471	4,830	353
8/13/12	5,300	706	1,770	118
8/14/12	4,000	471	2,000	118
8/15/12	8,480	1,530	18,000	1,650	AM reading high. Ran again at 11:20, 7,180 and 706. Complete clean performed before leaving.
8/16/12	1,410	235	5,180	824
8/20/12	9,300	824	6,470	706
8/21/12	3,880	353	3,650	471
8/22/12	8,120	589	5,650	824
8/23/12	4,240	589	6,590	942
8/27/12	3,410	706	1,650	235
8/28/12	2240	353	6,120	1,230
8/29/12	9,060	942	11,400	471
8/30/12	1410	353	9060	1650

CLAS12_R1

September 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
9/4/12	4,470	235	1,180	353
9/5/12	4,000	353	1,530	235
9/6/12	4,830	824	1,060	235
9/10/12	5,770	824	2,120	118
9/11/12	8,120	589	1,410	118
9/12/12	4,240	353	4,120	471
9/13/12	3,880	942	4,830	706
9/17/12	5,650	942	11,000	824
9/18/12	5,060	118	2,120	118
9/19/12	2,940	235	3,410	118
9/20/12	1,290	118	1,290	235
9/24/12	5,060	824	1,410	235
9/25/12	3,060	589	1,060	235
9/26/12	5,180	353	1,530	471
9/27/12	1,770	235	2,350	353

CLAS12_R1

October 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
10/1/12	4,360	589	2,120	471
10/2/12	2,120	118	3,180	589
10/3/12	1,650	471	706	353
10/4/12	2,350	235	1,290	353
10/8/12	2,470	235	2,830	118
10/9/12	2,940	589	1,180	118
10/10/12	471	118	2,240	942
10/11/12	4,590	1,290	3,650	824
10/15/12	1,060	118	1,060	0
10/16/12	6,710	1,180	5,060	589
10/17/12	942	235	3,180	589
10/18/12	1,880	353	3,530	824
10/22/12	2,240	471	5,060	706
10/23/12	2,120	118	4,940	235
10/24/12	3,770	706	1,530	353
10/25/12	2,120	118	1,290	118
10/29/12	3,300	471	4,120	706
10/30/12	3,880	1,060	2,830	353
10/31/12	1,410	118	1,530	471

CLAS12_R1

November 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
11/1/12	824	235	1,410	353
11/5/12	3,410	235	7,060	471
11/6/12	6,470	589	3,180	353
11/7/12	2,710	235	4,710	824
11/8/12	3,880	706	2,830	353
11/12/12	1,060	471	4,710	235
11/13/12	3,650	353	3,060	1,060	Sent particle counter to Kanomax for calibration. These readings and all subsequent readings until noted are from a loaner counter of the same model.
11/14/12	2,710	235	3,770	471
11/15/12	3,060	706	1,290	118
11/19/12	7,420	942	6,120	589
11/20/12	5,650	1,060	5,890	235
11/27/12	6,590	471	4,590	589
11/28/12	9,890	706	3,880	235
11/29/12	7,300	706	2,710	471
11/30/12	3,060	824	5,060	589

CLAS12_R1

December 2012

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
12/03/12	3,530	706	3,650	353
12/04/12	8,000	706	2,470	235
12/05/12	1,410	118	2,590	353
12/06/12	4,000	471	1,530	471
12/10/12	3,880	353	9,420	589
12/11/12	2,120	471	5,180	942	The pm particle count was done with the original ISU counter that we just received after calibration at Kanomax.
12/12/12	2,830	706	2,000	471
12/13/12	3,300	1,410	2,940	706
12/17/12	942	118	1,770	235
12/18/12	3,880	1,530	1,290	353
12/19/12	2,240	235	3,650	589

CLAS12_R1

January 2013

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
1/02/13	1,530	353	3,530	589
1/03/13	706	353	1,180	589
1/07/13	1,880	118	3,650	353
1/08/13	2,120	589	4,240	1,290
1/09/13	3,300	471	7,300	2,000
1/10/13	1,650	589	3,180	1,060
1/14/13	942	353	2,240	824
1/15/13	3,180	118	4,940	1,060
1/16/13	3,300	589	3,650	824
1/17/13	471	235

CLAS12_R1