PhysicsCleanRoomParticleCountLog

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According to http://www.set3.com/standards.html

Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.

Clas maximum particles/m³
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 352,000 83,200 2,930

The clean room using the same above particle counts.


The Physics clean room is about 200 [math]m^3[/math]

Clas Counts
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 70,400,000 83,200 2,930


The average and SD are calculated by taking 5 minute measurements 5 times.

Date Counts
≥0.3 µm ≥0.5 µm ≥5 µm
Goal 79,400,000 16,640,000 586,000
8/11/11 6040 [math]\pm[/math] 2532 914 [math]\pm[/math] 491 33[math]\pm[/math] 34


Measurements in ISO mode

Date maximum particles/m³
≥0.5 µm ≥5 µm comment
Goal 352,000 2,930
8/12/11 1,480 0
8/16/11 12,100 1,700 drapes have been open over weekend (painting floor)
8/21/11 4,240 283


Measurements in Single mode

Date maximum particles/m³
Morning Evening
≥0.5 µm ≥5 µm ≥0.5 µm ≥5 µm comment
Goal 352,000 2,930 352,000 2,930
8/21/11 6,990 353 25,000 3,880
8/22/11 33,400 3,770 35,800 3,770
8/23/11 9300 353