PhysicsCleanRoomParticleCountLog
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The definition of a Class 10,000 clean room according to
is
| Date | maximum particles/m³ | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 352,000 | 83,200 | 2,930 | |||
The Physics clean room is about 200
| Date | Counts | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 79,400,000 | 16,640,000 | 586,000 | |||
| 8/11/11 | 6040 2532 | 914 491 | 33 34 | |||