Beamline Parts
Mini UHV gate valve
Valve with pneumatic actuator:
single acting with closing spring (NC)
ISO-KF and CF-F
Leak rate: body / valve seat [math]\displaystyle{ < 5 \times 10^{-10}/ < 1 \times 10{-9} mbar Is{-1} }[/math] Pressure range [math]\displaystyle{ 1 \times 10{-10} }[/math] mbar to 2 bar (abs)