Beamline Parts
Mini UHV gate valve
Valve with pneumatic actuator:
single acting with closing spring (NC)
ISO-KF and CF-F
Leak rate: body / valve seat Pressure range mbar to 2 bar (abs)
Valve with pneumatic actuator:
single acting with closing spring (NC)
ISO-KF and CF-F
Leak rate: body / valve seat [math] \lt 5 \times 10^{-10}/ \lt 1 \times 10{-9} mbar Is{-1} [/math] Pressure range [math] 1 \times 10{-10} [/math] mbar to 2 bar (abs)