Definitions
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
Clas |
maximum particles/m³
|
ISO-146441 |
Federal Standard 209E
|
≥0.3 µm
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
ISO-6 |
1,000 |
102,000 |
35,200 |
8,320 |
293
|
ISO-7 |
10,000 |
|
352,000 |
83,200 |
2,930
|
The clean room using the same above particle counts.
PCR specific
The Physics clean room is about 200 [math]m^3[/math]
Clas |
Counts
|
ISO-146441 |
Federal Standard 209E
|
≥0.3 µm
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
ISO-6 |
1,000 |
102,000 |
35,200 |
8,320 |
293
|
ISO-7 |
10,000 |
|
70,400,000 |
83,200 |
2,930
|
The average and SD are calculated by taking 5 minute measurements 5 times.
Date |
Counts
|
|
≥0.3 µm
|
≥0.5 µm
|
≥5 µm
|
Goal |
79,400,000 |
16,640,000 |
586,000
|
8/11/11 |
6040 [math]\pm[/math] 2532 |
914 [math]\pm[/math] 491 |
33[math]\pm[/math] 34
|
Measurements in ISO mode
Date |
maximum particles/m³
|
|
≥0.5 µm |
≥5 µm |
comment
|
Goal |
352,000 |
2,930 |
|
8/12/11 |
1,480 |
0 |
|
8/16/11 |
12,100 |
1,700 |
drapes have been open over weekend (painting floor)
|
8/21/11 |
4,240 |
283 |
|
Measurements in Single mode
AUGUST
|
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
8/21/11 |
6,990 |
353 |
25,000 |
3,880 |
|
8/22/11 |
33,400 |
3,770 |
35,800 |
3,770 |
|
8/23/11 |
9,300 |
353 |
38,100 |
3,770 |
|
8/24/11 |
19,100 |
824 |
10,700 |
1,650 |
|
- Turned on Clean room in the afternoon of 8/23/11
SEPTEMBER
|
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
9/24/11 |
83,700 |
6,950 |
45,200 |
4,940 |
|
9/25/11 |
23,100 |
2,120 |
45,200 |
4,360 |
|
9/26/11 |
22,800 |
2,240 |
5,300 |
118 |
|
9/27/11 |
1,060 |
235 |
25,800 |
2,710 |
Adjustments to the chamber were being made within an hour of taking the evening particle count, this required the curtains being opened frequently
|
9/28/11 |
1,180 |
0 |
7,060 |
471 |
|
9/29/11 |
19,100 |
1,530 |
12,600 |
1,180 |
|
9/30/11 |
10,100 |
824 |
4,470 |
471 |
a concrete floor in the next room was cut before noon today (perhaps last night between 5pm and 10 pm)
|
OCTOBER
|
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
10/3/11 |
14,200 |
1,180 |
18,200 |
353 |
Snap fasteners were being installed late this afternoon to close gaps in our clean room wall
|
10/4/11 |
8,120 |
824 |
9,060 |
824 |
|
10/5/11 |
2,240 |
353 |
1,410 |
0 |
|
10/6/11 |
3,300 |
353 |
3,060 |
118 |
|
10/7/11 |
824 |
118 |
6,710 |
235 |
|
10/10/11 |
4,000 |
118 |
2,240 |
118 |
|