PhysicsCleanRoomParticleCountLog

Definitions

According to http://www.set3.com/standards.html

Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.

Clas		maximum particles/m³
ISO-146441	Federal Standard 209E	≥0.3 µm	≥0.5 µm	≥1 µm	≥5 µm
ISO-6	1,000	102,000	35,200	8,320	293
ISO-7	10,000		352,000	83,200	2,930

The clean room using the same above particle counts.

PCR specific

The Physics clean room is about 200 [math]m^3[/math]

Clas		Counts
ISO-146441	Federal Standard 209E	≥0.3 µm	≥0.5 µm	≥1 µm	≥5 µm
ISO-6	1,000	102,000	35,200	8,320	293
ISO-7	10,000		70,400,000	83,200	2,930

The average and SD are calculated by taking 5 minute measurements 5 times.

Date	Counts
	≥0.3 µm	≥0.5 µm	≥5 µm
Goal	79,400,000	16,640,000	586,000
8/11/11	6040 [math]\pm[/math] 2532	914 [math]\pm[/math] 491	33[math]\pm[/math] 34

Measurements in ISO mode

Date	maximum particles/m³
	≥0.5 µm	≥5 µm	comment
Goal	352,000	2,930
8/12/11	1,480	0
8/16/11	12,100	1,700	drapes have been open over weekend (painting floor)
8/21/11	4,240	283

Measurements in Single mode

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
8/21/11	6,990	353	25,000	3,880
8/22/11	33,400	3,770	35,800	3,770
8/23/11	9,300	353	38,100	3,770
8/23/11	Turned on Clean room in the afternoon
8/24/11	19,100	824	10,700	1,650
9/24/11	83,700	6,950	45,200	4,940
9/25/11	23,100	2,120