PhysicsCleanRoomParticleCountLog
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| Date | maximum particles/m³ | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 352,000 | 83,200 | 2,930 | |||
| 8/11/11 | 352,000 | 83,200 | 90\pm 40 | |||