PhysicsCleanRoomParticleCountLog
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| Date | maximum particles/m³ | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| align="right" | 352,000 | align="right" | 83,200 | align="right" | 2,930 | ||||||