PhysicsCleanRoomParticleCountLog
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| Class | maximum particles/m³ | FED STD 209E equivalent | |||||
|---|---|---|---|---|---|---|---|
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | |||||
| ISO 7 | 352,000 | 83,200 | 2,930 | ||||
| Class | maximum particles/m³ | FED STD 209E equivalent | |||||
|---|---|---|---|---|---|---|---|
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | |||||
| ISO 7 | 352,000 | 83,200 | 2,930 | ||||