Definitions
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
Clas |
maximum particles/m³
|
ISO-146441 |
Federal Standard 209E
|
≥0.3 µm
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
ISO-6 |
1,000 |
102,000 |
35,200 |
8,320 |
293
|
ISO-7 |
10,000 |
|
352,000 |
83,200 |
2,930
|
The clean room using the same above particle counts.
PCR specific
The Physics clean room is about 200 [math]m^3[/math]
Clas |
Counts
|
ISO-146441 |
Federal Standard 209E
|
≥0.3 µm
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
ISO-6 |
1,000 |
102,000 |
35,200 |
8,320 |
293
|
ISO-7 |
10,000 |
|
70,400,000 |
83,200 |
2,930
|
The average and SD are calculated by taking 5 minute measurements 5 times.
Date |
Counts
|
|
≥0.3 µm
|
≥0.5 µm
|
≥5 µm
|
Goal |
79,400,000 |
16,640,000 |
586,000
|
8/11/11 |
6040 [math]\pm[/math] 2532 |
914 [math]\pm[/math] 491 |
33[math]\pm[/math] 34
|
Measurements in ISO mode
Date |
maximum particles/m³
|
|
≥0.5 µm |
≥5 µm |
comment
|
Goal |
352,000 |
2,930 |
|
8/12/11 |
1,480 |
0 |
|
8/16/11 |
12,100 |
1,700 |
drapes have been open over weekend (painting floor)
|
8/21/11 |
4,240 |
283 |
|
Measurements in Single mode
Since 0.3 µm measurements are not a required measurement for Class 10,000, they are not included here.
August
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
8/21/11 |
6,990 |
353 |
25,000 |
3,880 |
|
8/22/11 |
33,400 |
3,770 |
35,800 |
3,770 |
|
8/23/11 |
9,300 |
353 |
38,100 |
3,770 |
|
8/24/11 |
19,100 |
824 |
10,700 |
1,650 |
|
- Turned on Clean room in the afternoon of 8/23/11
September
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
9/24/11 |
83,700 |
6,950 |
45,200 |
4,940 |
|
9/25/11 |
23,100 |
2,120 |
45,200 |
4,360 |
|
9/26/11 |
22,800 |
2,240 |
5,300 |
118 |
|
9/27/11 |
1,060 |
235 |
25,800 |
2,710 |
Adjustments to the chamber were being made within an hour of taking the evening particle count, this required the curtains being opened frequently
|
9/28/11 |
1,180 |
0 |
7,060 |
471 |
|
9/29/11 |
19,100 |
1,530 |
12,600 |
1,180 |
|
9/30/11 |
10,100 |
824 |
4,470 |
471 |
a concrete floor in the next room was cut before noon today (perhaps last night between 5pm and 10 pm)
|
October
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
10/3/11 |
14,200 |
1,180 |
18,200 |
353 |
Snap fasteners were being installed late this afternoon to close gaps in our clean room wall
|
10/4/11 |
8,120 |
824 |
9,060 |
824 |
|
10/5/11 |
2,240 |
353 |
1,410 |
0 |
|
10/6/11 |
3,300 |
353 |
3,060 |
118 |
|
10/7/11 |
824 |
118 |
6,710 |
235 |
|
10/10/11 |
4,000 |
118 |
2,240 |
118 |
|
10/11/11 |
1,650 |
235 |
2,830 |
118 |
|
10/12/11 |
1,530 |
0 |
1,060 |
235 |
|
10/13/11 |
2,240 |
353 |
5,060 |
118 |
|
10/14/11 |
7,300 |
589 |
4,830 |
235 |
|
10/17/11 |
4,830 |
235 |
15,300 |
471 |
|
10/18/11 |
4,710 |
353 |
5,530 |
235 |
|
10/19/11 |
8,710 |
353 |
4,120 |
235 |
|
10/20/11 |
6,710 |
589 |
24,700 |
1,180 |
They were cutting concrete in the adjacent room
|
10/21/11 |
4,360 |
353 |
3,770 |
235 |
|
10/22/11 |
3,180 |
235 |
5,410 |
118 |
|
10/24/11 |
6,590 |
118 |
11,900 |
283 |
The construction crew was digging outside and installing duct work in the adjacent rooms
|
10/25/11 |
11,100 |
0 |
2,830 |
353 |
|
10/26/11 |
3,060 |
0 |
7,180 |
353 |
New pre-filters were installed last night
|
10/27/11 |
942 |
0 |
5,410 |
353 |
|
10/28/11 |
6,950 |
942 |
4,940 |
118 |
|
10/31/11 |
3,060 |
0 |
4,360 |
0 |
|
November
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
11/1/11 |
942 |
118 |
8,360 |
471 |
|
11/2/11 |
1,880 |
118 |
1,180 |
118 |
|
11/3/11 |
824 |
0 |
7,890 |
118 |
|
11/4/11 |
0 |
0 |
5,890 |
118 |
The morning values are not a typo
|
11/5/11 |
12,900 |
1,060 |
2,000 |
0 |
|
11/6/11 |
1,650 |
353 |
1,650 |
0 |
|
11/7/11 |
4,240 |
0 |
8,830 |
235 |
|
11/8/11 |
4,710 |
2,350 |
471 |
118 |
The morning 5.0 µm counts were high, but still under class 10,000 specifications
|
11/9/11 |
2,000 |
118 |
3,410 |
353 |
|
11/10/11 |
1,650 |
0 |
13,800 |
1,060 |
|
11/11/11 |
2,240 |
118 |
1,410 |
235 |
|
11/14/11 |
1,410 |
0 |
2,240 |
118 |
|
11/15/11 |
2,240 |
235 |
2,940 |
118 |
|
11/16/11 |
1,060 |
118 |
2,000 |
235 |
|
11/17/11 |
3,650 |
235 |
2,240 |
353 |
|
11/18/11 |
589 |
0 |
2,120 |
118 |
|
11/19/11 |
2,000 |
235 |
|
|
|
11/21/11 |
5,180 |
235 |
1,180 |
0 |
|
11/22/11 |
4,120 |
353 |
6,830 |
235 |
|
11/23/11 |
471 |
235 |
824 |
235 |
|
11/28/11 |
235 |
0 |
1,650 |
0 |
|
11/29/11 |
3,530 |
118 |
6,120 |
235 |
|
11/30/11 |
1,530 |
0 |
4,830 |
235 |
|
December
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
12/1/11 |
706 |
0 |
5,180 |
589 |
|
12/2/11 |
1,180 |
118 |
1,180 |
118 |
|
12/3/11 |
1,650 |
471 |
|
|
|
12/5/11 |
118 |
0 |
3,060 |
0 |
|
12/6/11 |
2,470 |
235 |
5,180 |
589 |
|
12/7/11 |
5,530 |
0 |
3,880 |
118 |
|
12/8/11 |
2,240 |
0 |
10,500 |
942 |
|
12/9/11 |
1,530 |
118 |
5,060 |
471 |
|
12/12/11 |
9,530 |
471 |
4,120 |
353 |
|
12/13/11 |
4,830 |
353 |
7,420 |
589 |
|
12/14/11 |
1,770 |
118 |
13,100 |
824 |
|
12/15/11 |
|
|
942 |
235 |
The large roll up doors were installed earlier today.
|
12/19/11 |
6,000 |
118 |
8,000 |
118 |
|
12/20/11 |
26,700 |
1,180 |
2,590 |
0 |
|
12/21/11 |
824 |
235 |
7,300 |
235 |
|
12/22/11 |
2,470 |
353 |
4,360 |
235 |
|
12/23/11 |
1,530 |
235 |
2,120 |
0 |
|
January
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
1/3/12 |
1,290 |
118 |
4,470 |
589 |
|
1/4/12 |
3,180 |
235 |
1,880 |
0 |
|
1/5/12 |
2,240 |
235 |
3,530 |
235 |
|
1/6/12 |
2,470 |
471 |
2,590 |
0 |
|
1/9/12 |
1,880 |
471 |
4,000 |
118 |
|
1/10/12 |
5,180 |
471 |
1,650 |
0 |
|
1/11/12 |
8,830 |
706 |
3,060 |
471 |
|
1/12/12 |
2,590 |
118 |
9,060 |
706 |
|
1/13/12 |
2,000 |
118 |
5,890 |
353 |
|
1/17/12 |
1,410 |
0 |
824 |
118 |
|
1/18/12 |
2,240 |
0 |
2,350 |
0 |
|
1/19/12 |
8,590 |
1,530 |
2,470 |
118 |
|
1/20/12 |
5,300 |
235 |
2,940 |
235 |
|
1/23/12 |
6,830 |
706 |
4,000 |
942 |
|
1/24/12 |
2,350 |
353 |
20,500 |
1,180 |
|
1/25/12 |
1,880 |
235 |
12,100 |
706 |
|
1/26/12 |
33,900 |
3,060 |
2,710 |
471 |
|
1/27/12 |
4,590 |
353 |
3,880 |
706 |
|
1/30/12 |
1,290 |
353 |
2,350 |
235 |
|
1/31/12 |
11,200 |
1,290 |
235 |
0 |
|
February
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
2/1/12 |
2,710 |
471 |
2,000 |
118 |
|
2/2/12 |
9,060 |
471 |
5,890 |
706 |
|
2/3/12 |
9,180 |
824 |
4,590 |
1,650 |
|
2/6/12 |
13,900 |
1,180 |
10,600 |
589 |
|
2/7/12 |
5,530 |
118 |
15,300 |
824 |
|
2/9/12 |
|
|
4,000 |
471 |
|
2/14/12 |
16,400 |
1,180 |
14,200 |
5,770 |
|
2/15/12 |
1,180 |
118 |
12,600 |
1,650 |
|
2/16/12 |
7,420 |
1,060 |
39,800 |
4,830 |
|
2/17/12 |
7,180 |
824 |
6,000 |
7,060 |
|
2/21/12 |
11,700 |
471 |
1,180 |
118 |
|
2/22/12 |
2,350 |
118 |
10,000 |
1,290 |
|
2/23/12 |
21,300 |
589 |
10,100 |
706 |
|
2/24/12 |
5,890 |
824 |
37,800 |
3,180 |
|
2/27/12 |
11,700 |
2,240 |
12,600 |
706 |
|
2/28/12 |
7,300 |
1,180 |
8,830 |
353 |
|
2/29/12 |
3,530 |
235 |
3,720 |
389 |
|
March 2012
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
3/01/12 |
17,800 |
1,770 |
39,200 |
2,940 |
|
3/02/12 |
6,710 |
353 |
33,200 |
7,530 |
|
3/05/12 |
3,300 |
942 |
11,100 |
1,770 |
|
3/06/12 |
9,060 |
1,770 |
20,800 |
3,060 |
|
3/07/12 |
32,210 |
2,120 |
49,000 |
4,940 |
|
3/08/12 |
56,300 |
8,120 |
61,300 |
8,890 |
|
3/09/12 |
10,500 |
2,470 |
6,500 |
1,100 |
|
3/12/12 |
7,530 |
1,060 |
52,700 |
2,940 |
|
3/13/12 |
26,000 |
4,590 |
2,120 |
118 |
|
3/14/12 |
34,500 |
4,590 |
53,900 |
5,180 |
|
3/15/12 |
4,120 |
235 |
8,710 |
824 |
|
3/16/12 |
1,410 |
471 |
7,890 |
1,290 |
|
3/19/12 |
9,180 |
353 |
17,000 |
1,530 |
|
3/20/12 |
2,830 |
471 |
3,650 |
452 |
|
3/21/12 |
4,510 |
558 |
19,300 |
1,180 |
|
3/22/12 |
11,100 |
1,770 |
12,100 |
942 |
|
3/23/12 |
5,650 |
589 |
1,770 |
471 |
|
3/26/12 |
3,530 |
218 |
2,120 |
314 |
|
3/27/12 |
2,940 |
353 |
14,600 |
1,650 |
|
3/28/12 |
1,900 |
239 |
10,040 |
1,530 |
|
3/29/12 |
13,700 |
942 |
4,710 |
706 |
|
3/30/12 |
36,600 |
1,400 |
9,300 |
471 |
|
April 2012
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
4/02/12 |
3,180 |
471 |
56,600 |
2,830 |
|
4/03/12 |
1,180 |
235 |
3,180 |
235 |
|
4/04/12 |
706 |
118 |
7,420 |
824 |
|
4/05/12 |
13,200 |
1,180 |
1,650 |
235 |
|
4/06/12 |
2,710 |
589 |
26,500 |
1,370 |
|
4/09/12 |
1,650 |
235 |
2,350 |
118 |
|
4/10/12 |
7,530 |
353 |
8,590 |
471 |
|
4/11/12 |
5,690 |
129 |
8,480 |
353 |
|
4/12/12 |
1,180 |
235 |
6,120 |
471 |
|
4/13/12 |
2,710 |
353 |
1,170 |
942 |
|
4/16/12 |
2,480 |
589 |
11,500 |
471 |
|
4/17/12 |
2,350 |
591 |
4,590 |
471 |
|
4/18/12 |
8,120 |
706 |
3,410 |
482 |
|
4/19/12 |
2,510 |
445 |
13,500 |
942 |
|
4/20/12 |
1,290 |
353 |
4,120 |
235 |
|
4/23/12 |
8,000 |
706 |
8,360 |
727 |
|
4/24/12 |
8,410 |
589 |
4,360 |
353 |
|
4/25/12 |
2,020 |
224 |
6,360 |
824 |
|
4/26/12 |
9,060 |
1,180 |
4,940 |
353 |
|
4/27/12 |
6,240 |
471 |
9,180 |
589 |
|
4/30/12 |
1,770 |
235 |
4,360 |
265 |
|
CLAS12_R1
May 2012
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
5/1/12 |
5,890 |
471 |
2,240 |
482 |
|
5/2/12 |
7,410 |
589 |
13,500 |
353 |
|
5/3/12 |
3,300 |
489 |
8,240 |
400 |
|
5/4/12 |
6,470 |
1,410 |
6,710 |
589 |
|
5/7/12 |
1,180 |
118 |
3,880 |
471 |
|
5/8/12 |
5,890 |
353 |
5,300 |
118 |
|
5/9/12 |
7,180 |
471 |
5,180 |
824 |
|
5/10/12 |
2,950 |
318 |
2,350 |
353 |
|
5/11/12 |
7,300 |
353 |
3,880 |
329 |
|
5/14/12 |
5,180 |
706 |
4,830 |
353 |
|
5/15/12 |
1,650 |
118 |
4,360 |
118 |
|
5/16/12 |
4,680 |
853 |
2,830 |
235 |
|
5/17/12 |
1,060 |
589 |
2,240 |
351 |
|
5/18/12 |
1,290 |
118 |
3,650 |
435 |
|
5/21/12 |
1,980 |
128 |
824 |
235 |
|
5/22/12 |
5,650 |
353 |
9,770 |
824 |
|
5/23/12 |
2,830 |
118 |
1,650 |
706 |
|
5/24/12 |
1,680 |
148 |
3,650 |
118 |
|
5/25/12 |
3,060 |
471 |
10,200 |
706 |
|
5/29/12 |
6,000 |
706 |
9,770 |
1060 |
|
5/30/12 |
6,240 |
353 |
4,470 |
353 |
|
5/31/12 |
706 |
235 |
1,060 |
128 |
|
CLAS12_R1
June 2012
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
6/1/12 |
3,770 |
353 |
3,880 |
353 |
|
6/4/12 |
2,120 |
353 |
1,880 |
235 |
|
6/5/12 |
3,180 |
471 |
3,300 |
118 |
|
6/6/12 |
1,290 |
235 |
2,590 |
218 |
|
6/7/12 |
3,770 |
471 |
4,000 |
353 |
|
6/8/12 |
2,710 |
118 |
2,240 |
589 |
|
6/11/12 |
3,880 |
589 |
15,200 |
1,650 |
|
6/12/12 |
3,770 |
353 |
10,700 |
1,180 |
|
6/13/12 |
2,350 |
118 |
1,650 |
235 |
|
6/14/12 |
1,770 |
118 |
4,830 |
942 |
|
6/15/12 |
2,710 |
235 |
5,650 |
824 |
|
6/18/12 |
4,000 |
706 |
5,180 |
706 |
|
6/19/12 |
7,420 |
589 |
2,710 |
235 |
|
6/20/12 |
4,240 |
353 |
9,300 |
1,060 |
|
6/21/12 |
2,940 |
589 |
4,000 |
589 |
|
6/25/12 |
4,240 |
471 |
3,410 |
353 |
|
6/26/12 |
2,830 |
353 |
2,830 |
118 |
|
6/27/12 |
1,020 |
106 |
25,200 |
2,000 |
|
6/28/12 |
2,590 |
118 |
10,400 |
1,060 |
|
July 2012
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
7/2/12 |
2,710 |
589 |
9,530 |
353 |
|
7/3/12 |
2,590 |
235 |
3,770 |
589 |
|
7/5/12 |
3,410 |
589 |
11,800 |
235 |
|
7/9/12 |
3,300 |
471 |
3,410 |
706 |
|
7/11/12 |
2,590 |
353 |
7,530 |
942 |
|
7/12/12 |
3,410 |
235 |
5,410 |
706 |
|
7/16/12 |
7,300 |
1,060 |
4,590 |
706 |
|
7/17/12 |
3,060 |
118 |
6,830 |
824 |
|
7/18/12 |
2,350 |
118 |
6,240 |
942 |
|
7/19/12 |
2,000 |
589 |
6,590 |
824 |
|
7/23/12 |
3,180 |
824 |
1,530 |
235 |
|
7/24/12 |
3,060 |
706 |
26,700 |
706 |
|
7/25/12 |
3,530 |
589 |
3,650 |
235 |
|
7/26/12 |
4,120 |
471 |
5,890 |
1,060 |
|
7/30/12 |
3,770 |
353 |
3,650 |
235 |
|
7/31/12 |
3,650 |
235 |
4,240 |
1,410 |
|
CLAS12_R1
August 2012
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
8/1/12 |
2,350 |
235 |
4,710 |
589 |
|
8/2/12 |
2,710 |
118 |
2,590 |
118 |
|
8/6/12 |
7,530 |
1,410 |
2,240 |
589 |
AM reading high. Ran again at 11:30, 2000 and 118
|
8/7/12 |
3,650 |
471 |
4,470 |
471 |
|
8/8/12 |
5,410 |
824 |
4,710 |
706 |
|
8/9/12 |
3,880 |
471 |
4,830 |
353 |
|
8/13/12 |
5,300 |
706 |
1,770 |
118 |
|
8/14/12 |
4,000 |
471 |
2,000 |
118 |
|
8/15/12 |
8,480 |
1,530 |
18,000 |
1,650 |
AM reading high. Ran again at 11:20, 7,180 and 706. Complete clean performed before leaving.
|
8/16/12 |
1,410 |
235 |
5,180 |
824 |
|
8/20/12 |
9,300 |
824 |
6,470 |
706 |
|
8/21/12 |
3,880 |
353 |
3,650 |
471 |
|
8/22/12 |
8,120 |
589 |
5,650 |
824 |
|
8/23/12 |
4,240 |
589 |
6,590 |
942 |
|
8/27/12 |
3,410 |
706 |
1,650 |
235 |
|
8/28/12 |
2240 |
353 |
6,120 |
1,230 |
|
8/29/12 |
9,060 |
942 |
11,400 |
471 |
|
8/30/12 |
1410 |
353 |
9060 |
1650 |
|
CLAS12_R1
September 2012
maximum particles/m³
|
|
Morning |
Evening
|
Date |
≥0.5 µm |
≥5 µm |
≥0.5 µm |
≥5 µm |
Comments
|
Goal |
352,000 |
2,930 |
352,000 |
2,930 |
|
9/4/12 |
4,470 |
235 |
1,180 |
353 |
|
9/5/12 |
4,000 |
353 |
1,530 |
235 |
|
9/6/12 |
4,830 |
824 |
1,060 |
235 |
|
9/10/12 |
5,770 |
824 |
2,120 |
118 |
|
9/11/12 |
8,120 |
589 |
1,410 |
118 |
|
9/12/12 |
4,240 |
353 |
|
|
|
CLAS12_R1
October 2012
CLAS12_R1
November 2012
CLAS12_R1
December 2012
CLAS12_R1