PhysicsCleanRoomParticleCountLog

Definitions

According to http://www.set3.com/standards.html

Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.

Clas		maximum particles/m³
ISO-146441	Federal Standard 209E	≥0.3 µm	≥0.5 µm	≥1 µm	≥5 µm
ISO-6	1,000	102,000	35,200	8,320	293
ISO-7	10,000		352,000	83,200	2,930

The clean room using the same above particle counts.

PCR specific

The Physics clean room is about 200 [math]m^3[/math]

Clas		Counts
ISO-146441	Federal Standard 209E	≥0.3 µm	≥0.5 µm	≥1 µm	≥5 µm
ISO-6	1,000	102,000	35,200	8,320	293
ISO-7	10,000		70,400,000	83,200	2,930

The average and SD are calculated by taking 5 minute measurements 5 times.

Date	Counts
	≥0.3 µm	≥0.5 µm	≥5 µm
Goal	79,400,000	16,640,000	586,000
8/11/11	6040 [math]\pm[/math] 2532	914 [math]\pm[/math] 491	33[math]\pm[/math] 34

Measurements in ISO mode

Date	maximum particles/m³
	≥0.5 µm	≥5 µm	comment
Goal	352,000	2,930
8/12/11	1,480	0
8/16/11	12,100	1,700	drapes have been open over weekend (painting floor)
8/21/11	4,240	283

Measurements in Single mode

Since 0.3 µm measurements are not a required measurement for Class 10,000, they are not included here.

August

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
8/21/11	6,990	353	25,000	3,880
8/22/11	33,400	3,770	35,800	3,770
8/23/11	9,300	353	38,100	3,770
8/24/11	19,100	824	10,700	1,650

Turned on Clean room in the afternoon of 8/23/11

September

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
9/24/11	83,700	6,950	45,200	4,940
9/25/11	23,100	2,120	45,200	4,360
9/26/11	22,800	2,240	5,300	118
9/27/11	1,060	235	25,800	2,710	Adjustments to the chamber were being made within an hour of taking the evening particle count, this required the curtains being opened frequently
9/28/11	1,180	0	7,060	471
9/29/11	19,100	1,530	12,600	1,180
9/30/11	10,100	824	4,470	471	a concrete floor in the next room was cut before noon today (perhaps last night between 5pm and 10 pm)

October

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
10/3/11	14,200	1,180	18,200	353	Snap fasteners were being installed late this afternoon to close gaps in our clean room wall
10/4/11	8,120	824	9,060	824
10/5/11	2,240	353	1,410	0
10/6/11	3,300	353	3,060	118
10/7/11	824	118	6,710	235
10/10/11	4,000	118	2,240	118
10/11/11	1,650	235	2,830	118
10/12/11	1,530	0	1,060	235
10/13/11	2,240	353	5,060	118
10/14/11	7,300	589	4,830	235
10/17/11	4,830	235	15,300	471
10/18/11	4,710	353	5,530	235
10/19/11	8,710	353	4,120	235
10/20/11	6,710	589	24,700	1,180	They were cutting concrete in the adjacent room
10/21/11	4,360	353	3,770	235
10/22/11	3,180	235	5,410	118
10/24/11	6,590	118	11,900	283	The construction crew was digging outside and installing duct work in the adjacent rooms
10/25/11	11,100	0	2,830	353
10/26/11	3,060	0	7,180	353	New pre-filters were installed last night
10/27/11	942	0	5,410	353
10/28/11	6,950	942	4,940	118
10/31/11	3,060	0	4,360	0

November

maximum particles/m³
	Morning		Evening
Date	≥0.5 µm	≥5 µm	≥0.5 µm	≥5 µm	Comments
Goal	352,000	2,930	352,000	2,930
11/1/11	942	118	8,360	471
11/2/11	1,880	118	1,180	118
11/3/11	824	0	7,890	118
11/4/11	0	0	5,890	118	The morning values are not a typo
11/5/11	12,900	1,060	2,000	0
11/6/11	1,650	353	1,650	0
11/7/11	4,240	0	8,830	235
11/8/11	4,710	2,350	471	118	The morning 5.0 µm counts were high, but still under class 10,000 specifications
11/9/11	2,000	118	3,410	353
11/10/11	1,650	0	13,800	1,060
11/11/11	2,240	118	1,410	235
11/14/11	1,410	0	2,240	118
11/15/11	2,240	235	2,940	118
11/16/11	1,060	118	2,000	235
11/17/11	3,650	235	2,240	353
11/18/11	589	0	2,120	118
11/19/11	2,000	235
11/21/11	5,180	235	1,180	0
11/22/11	4,120	353	6,830	235
11/23/11	471	235	824	235
11/28/11	235	0	1,650	0
11/29/11	3,530	118	6,120	235
11/30/11	1,530	0	4,830	235

CLAS12_R1