According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
| Clas |
maximum particles/m³
|
| ISO-146441 |
Federal Standard 209E
|
≥0.3 µm
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
| ISO-6 |
1,000 |
102,000 |
35,200 |
8,320 |
293
|
| ISO-7 |
10,000 |
|
352,000 |
83,200 |
2,930
|
The clean room using the same above particle counts.
The Physics clean room is about 200 [math]m^3[/math]
| Clas |
Counts
|
| ISO-146441 |
Federal Standard 209E
|
≥0.3 µm
|
≥0.5 µm
|
≥1 µm
|
≥5 µm
|
| ISO-6 |
1,000 |
102,000 |
35,200 |
8,320 |
293
|
| ISO-7 |
10,000 |
|
70,400,000 |
83,200 |
2,930
|
The average and SD are calculated by taking 5 minute measurements 5 times.
| Date |
Counts
|
|
|
≥0.3 µm
|
≥0.5 µm
|
≥5 µm
|
| Goal |
79,400,000 |
16,640,000 |
586,000
|
| 8/11/11 |
6040 [math]\pm[/math] 2532 |
914 [math]\pm[/math] 491 |
33[math]\pm[/math] 34
|
Measurements in ISO mode
| Date |
maximum particles/m³
|
| ≥0.5 µm |
≥5 µm
|
| 8/12/11 |
1480 |
0
|