PhysicsCleanRoomParticleCountLog
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According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
CLAS | maximum particles/m³ | ||||
≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm | ||
---|---|---|---|---|---|
ISO-6 | 1,000 | 352,000 | 83,200 | 2,930 | |
ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 |
The clean room using the same above particle counts.
The Physics clean room is about 200
Date | Counts | |||||
≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
---|---|---|---|---|---|---|
Goal | 79,400,000 | 16,640,000 | 586,000 | |||
8/11/11 | 6040 | 2532914 | 49133 | 34