Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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|10/20/11 || 6,710 || 589 || 24,700 || 1,180 || | |10/20/11 || 6,710 || 589 || 24,700 || 1,180 || | ||
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− | |10/21/11 || 4,360 || 353 || || || | + | |10/21/11 || 4,360 || 353 || 3,770 || 235 || |
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Revision as of 00:34, 22 October 2011
Definitions
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
Clas | maximum particles/m³ | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 |
The clean room using the same above particle counts.
PCR specific
The Physics clean room is about 200
Clas | Counts | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 70,400,000 | 83,200 | 2,930 |
The average and SD are calculated by taking 5 minute measurements 5 times.
Date | Counts | |||||
≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
---|---|---|---|---|---|---|
Goal | 79,400,000 | 16,640,000 | 586,000 | |||
8/11/11 | 6040 | 2532914 | 49133 | 34
Measurements in ISO mode
Date | maximum particles/m³ | ||
≥0.5 µm | ≥5 µm | comment | |
Goal | 352,000 | 2,930 | |
8/12/11 | 1,480 | 0 | |
8/16/11 | 12,100 | 1,700 | drapes have been open over weekend (painting floor) |
8/21/11 | 4,240 | 283 |
Measurements in Single mode
Since 0.3 µm measurements are not a required measurement for Class 10,000, they are not included here.
August
maximum particles/m³ | |||||
Morning | Evening | ||||
Date | ≥0.5 µm | ≥5 µm | ≥0.5 µm | ≥5 µm | Comments |
Goal | 352,000 | 2,930 | 352,000 | 2,930 | |
8/21/11 | 6,990 | 353 | 25,000 | 3,880 | |
8/22/11 | 33,400 | 3,770 | 35,800 | 3,770 | |
8/23/11 | 9,300 | 353 | 38,100 | 3,770 | |
8/24/11 | 19,100 | 824 | 10,700 | 1,650 |
- Turned on Clean room in the afternoon of 8/23/11
September
maximum particles/m³ | |||||
Morning | Evening | ||||
Date | ≥0.5 µm | ≥5 µm | ≥0.5 µm | ≥5 µm | Comments |
Goal | 352,000 | 2,930 | 352,000 | 2,930 | |
9/24/11 | 83,700 | 6,950 | 45,200 | 4,940 | |
9/25/11 | 23,100 | 2,120 | 45,200 | 4,360 | |
9/26/11 | 22,800 | 2,240 | 5,300 | 118 | |
9/27/11 | 1,060 | 235 | 25,800 | 2,710 | Adjustments to the chamber were being made within an hour of taking the evening particle count, this required the curtains being opened frequently |
9/28/11 | 1,180 | 0 | 7,060 | 471 | |
9/29/11 | 19,100 | 1,530 | 12,600 | 1,180 | |
9/30/11 | 10,100 | 824 | 4,470 | 471 | a concrete floor in the next room was cut before noon today (perhaps last night between 5pm and 10 pm) |
October
maximum particles/m³ | |||||
Morning | Evening | ||||
Date | ≥0.5 µm | ≥5 µm | ≥0.5 µm | ≥5 µm | Comments |
Goal | 352,000 | 2,930 | 352,000 | 2,930 | |
10/3/11 | 14,200 | 1,180 | 18,200 | 353 | Snap fasteners were being installed late this afternoon to close gaps in our clean room wall |
10/4/11 | 8,120 | 824 | 9,060 | 824 | |
10/5/11 | 2,240 | 353 | 1,410 | 0 | |
10/6/11 | 3,300 | 353 | 3,060 | 118 | |
10/7/11 | 824 | 118 | 6,710 | 235 | |
10/10/11 | 4,000 | 118 | 2,240 | 118 | |
10/11/11 | 1,650 | 235 | 2,830 | 118 | |
10/12/11 | 1,530 | 0 | 1,060 | 235 | |
10/13/11 | 2,240 | 353 | 5,060 | 118 | |
10/14/11 | 7,300 | 589 | 4,830 | 235 | |
10/17/11 | 4,830 | 235 | 15,300 | 471 | |
10/18/11 | 4,710 | 353 | 5,530 | 235 | |
10/19/11 | 8,710 | 353 | 4,120 | 235 | |
10/20/11 | 6,710 | 589 | 24,700 | 1,180 | |
10/21/11 | 4,360 | 353 | 3,770 | 235 |