Difference between revisions of "PhysicsCleanRoomParticleCountLog"

From New IAC Wiki
Jump to navigation Jump to search
Line 117: Line 117:
 
|-
 
|-
 
|9/28/11 || 1,180 || 0 || 7,060 || 471 ||
 
|9/28/11 || 1,180 || 0 || 7,060 || 471 ||
 +
|-
 +
|9/29/11 || 19,100 || 1,530 || || ||
 
|}
 
|}

Revision as of 16:00, 29 September 2011

Definitions

According to http://www.set3.com/standards.html

Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.

Clas maximum particles/m³
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 352,000 83,200 2,930

The clean room using the same above particle counts.

PCR specific

The Physics clean room is about 200 [math]m^3[/math]

Clas Counts
ISO-146441 Federal Standard 209E ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm
ISO-6 1,000 102,000 35,200 8,320 293
ISO-7 10,000 70,400,000 83,200 2,930


The average and SD are calculated by taking 5 minute measurements 5 times.

Date Counts
≥0.3 µm ≥0.5 µm ≥5 µm
Goal 79,400,000 16,640,000 586,000
8/11/11 6040 [math]\pm[/math] 2532 914 [math]\pm[/math] 491 33[math]\pm[/math] 34


Measurements in ISO mode

Date maximum particles/m³
≥0.5 µm ≥5 µm comment
Goal 352,000 2,930
8/12/11 1,480 0
8/16/11 12,100 1,700 drapes have been open over weekend (painting floor)
8/21/11 4,240 283

Measurements in Single mode

maximum particles/m³
Morning Evening
Date ≥0.5 µm ≥5 µm ≥0.5 µm ≥5 µm Comments
Goal 352,000 2,930 352,000 2,930
8/21/11 6,990 353 25,000 3,880
8/22/11 33,400 3,770 35,800 3,770
8/23/11 9,300 353 38,100 3,770
8/24/11 19,100 824 10,700 1,650
Turned on Clean room in the afternoon of 8/23/11
maximum particles/m³
Morning Evening
Date ≥0.5 µm ≥5 µm ≥0.5 µm ≥5 µm Comments
Goal 352,000 2,930 352,000 2,930
9/24/11 83,700 6,950 45,200 4,940
9/25/11 23,100 2,120 45,200 4,360
9/26/11 22,800 2,240 5,300 118
9/27/11 1,060 235 25,800 2,710 Adjustments to the chamber were being made within an hour of taking the evening particle count, this required the curtains being opened frequently
9/28/11 1,180 0 7,060 471
9/29/11 19,100 1,530