Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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|8/21/11 || 4,240 || 283|| | |8/21/11 || 4,240 || 283|| | ||
+ | |} | ||
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+ | =Measurements in Single mode= | ||
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+ | {|border="1" | cellpadding="20" cellspacing="0 class="wikitable" | ||
+ | |- | ||
+ | | Date|| colspan="4" align="center" | '''maximum particles/m³''' | ||
+ | |- | ||
+ | | || colspan="2" align="center" | Morning || colspan="2" align="center" | Evening || | ||
+ | |- | ||
+ | | || ≥0.5 µm|| ≥5 µm || ≥0.5 µm|| ≥5 µm ||comment | ||
+ | |- | ||
+ | |Goal ||352,000 || 2,930|| 352,000 || 2930 || | ||
+ | |- | ||
+ | |8/21/11 || 6990 || 353|| 25000 || 3880|| | ||
+ | |- | ||
+ | |8/22/11 || 33400 || 3770|| || || | ||
|} | |} |
Revision as of 20:57, 23 August 2011
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
Clas | maximum particles/m³ | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 |
The clean room using the same above particle counts.
The Physics clean room is about 200
Clas | Counts | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 70,400,000 | 83,200 | 2,930 |
The average and SD are calculated by taking 5 minute measurements 5 times.
Date | Counts | |||||
≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
---|---|---|---|---|---|---|
Goal | 79,400,000 | 16,640,000 | 586,000 | |||
8/11/11 | 6040 | 2532914 | 49133 | 34
Measurements in ISO mode
Date | maximum particles/m³ | ||
≥0.5 µm | ≥5 µm | comment | |
Goal | 352,000 | 2,930 | |
8/12/11 | 1,480 | 0 | |
8/16/11 | 12,100 | 1,700 | drapes have been open over weekend (painting floor) |
8/21/11 | 4,240 | 283 |
Measurements in Single mode
Date | maximum particles/m³ | ||||
Morning | Evening | ||||
≥0.5 µm | ≥5 µm | ≥0.5 µm | ≥5 µm | comment | |
Goal | 352,000 | 2,930 | 352,000 | 2930 | |
8/21/11 | 6990 | 353 | 25000 | 3880 | |
8/22/11 | 33400 | 3770 |