Difference between revisions of "PhysicsCleanRoomParticleCountLog"
Jump to navigation
Jump to search
Line 25: | Line 25: | ||
{|border="1" | cellpadding="20" cellspacing="0 class="wikitable" | {|border="1" | cellpadding="20" cellspacing="0 class="wikitable" | ||
|- | |- | ||
− | | colspan="2" | Clas|| colspan="4" align="center" | ''' | + | | colspan="2" | Clas|| colspan="4" align="center" | '''Counts''' |
|- | |- | ||
| ISO-146441||Federal Standard 209E | | ISO-146441||Federal Standard 209E | ||
Line 35: | Line 35: | ||
|ISO-6 || 1,000 || align="right" | 102,000 ||align="right" | 35,200 || align="right" | 8,320 || align="right" | 293 | |ISO-6 || 1,000 || align="right" | 102,000 ||align="right" | 35,200 || align="right" | 8,320 || align="right" | 293 | ||
|- | |- | ||
− | |ISO-7 || 10,000 || ||align="right" | | + | |ISO-7 || 10,000 || ||align="right" | 70,400,000|| align="right" | 83,200 || align="right" | 2,930 |
|} | |} | ||
Revision as of 18:53, 12 August 2011
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
Clas | maximum particles/m³ | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 |
The clean room using the same above particle counts.
The Physics clean room is about 200
Clas | Counts | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 70,400,000 | 83,200 | 2,930 |
The average and SD are calculated by taking 5 minute measurements 5 times.
Date | Counts | |||||
≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
---|---|---|---|---|---|---|
Goal | 79,400,000 | 16,640,000 | 586,000 | |||
8/11/11 | 6040 | 2532914 | 49133 | 34