Beamline Parts

Mini UHV gate valve

Valve with pneumatic actuator:

single acting with closing spring (NC)

ISO-KF and CF-F

Manual: File:Mini UHV gate valve Manual.pdf

File:Mini UHV gate valve.pdf

[1]

Leak rate: body / valve seat: [math] \lt 5 \times 10^{-10}/ \lt 1 \times 10^{-9}~mbar~Is^{-1} [/math]

Pressure range: [math] 1 \times 10{-10} [/math] mbar to 2 bar (abs)

1 millibar = 0.750061683 torr = 0.75 torr