Difference between revisions of "PhysicsCleanRoomParticleCountLog"
Jump to navigation
Jump to search
| Line 22: | Line 22: | ||
The Physics clean room is about 200 <math>m^3</math> | The Physics clean room is about 200 <math>m^3</math> | ||
| + | |||
| + | {|border="1" | cellpadding="20" cellspacing="0 class="wikitable" | ||
| + | |- | ||
| + | | colspan="2" | Clas|| colspan="4" align="center" | '''maximum particles/m³''' | ||
| + | |- | ||
| + | | ISO-146441||Federal Standard 209E | ||
| + | ! ≥0.3 µm | ||
| + | ! ≥0.5 µm | ||
| + | ! ≥1 µm | ||
| + | ! ≥5 µm | ||
| + | |- | ||
| + | |ISO-6 || 1,000 || align="right" | 102,000 ||align="right" | 35,200 || align="right" | 8,320 || align="right" | 293 | ||
| + | |- | ||
| + | |ISO-7 || 10,000 || ||align="right" | 352,000|| align="right" | 83,200 || align="right" | 2,930 | ||
| + | |} | ||
| + | |||
{|border="1" | cellpadding="20" cellspacing="0 class="wikitable" | {|border="1" | cellpadding="20" cellspacing="0 class="wikitable" | ||
Revision as of 18:44, 12 August 2011
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
| Clas | maximum particles/m³ | ||||
| ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
|---|---|---|---|---|---|
| ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 | |
The clean room using the same above particle counts.
The Physics clean room is about 200
| Clas | maximum particles/m³ | ||||
| ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
|---|---|---|---|---|---|
| ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 | |
| Date | Counts | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 79,400,000 | 16,640,000 | 586,000 | |||
| 8/11/11 | 6040 2532 | 914 491 | 33 34 | |||