Difference between revisions of "PhysicsCleanRoomParticleCountLog"

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The definition of a Class 10,000 clean room according to
 
The definition of a Class 10,000 clean room according to
 
+
Federal Standard 209E, which has been recently replaced with ISO-146441 is
is
 
  
  

Revision as of 18:29, 12 August 2011

The definition of a Class 10,000 clean room according to Federal Standard 209E, which has been recently replaced with ISO-146441 is


Date maximum particles/m³
≥0.3 µm ≥0.5 µm ≥5 µm
Goal 352,000 83,200 2,930

The Physics clean room is about 200 [math]m^3[/math]

Date Counts
≥0.3 µm ≥0.5 µm ≥5 µm
Goal 79,400,000 16,640,000 586,000
8/11/11 6040 [math]\pm[/math] 2532 914 [math]\pm[/math] 491 33[math]\pm[/math] 34