Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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| − | {| class="wikitable" | + | {|border="1" | cellpadding="20" cellspacing="0 class="wikitable" |
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| Date|| colspan="6" align="center" | '''maximum particles/m³''' | | Date|| colspan="6" align="center" | '''maximum particles/m³''' | ||
Revision as of 18:17, 12 August 2011
| Date | maximum particles/m³ | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| 352,000 | 83,200 | 2,930 | ||||