Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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(Created page with ' {| class="wikitable" |- ! rowspan="2" | Class | colspan="6" align="center" | '''maximum particles/m³''' ! rowspan="2" | FED STD 209E<br>equivalent |- ! ≥0.3 µm ! ≥0.5…') |
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{| class="wikitable" | {| class="wikitable" | ||
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| colspan="6" align="center" | '''maximum particles/m³''' | | colspan="6" align="center" | '''maximum particles/m³''' | ||
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! ≥0.3 µm | ! ≥0.3 µm | ||
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! ≥5 µm | ! ≥5 µm | ||
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| align="right" | 352,000 | | align="right" | 352,000 | ||
| align="right" | 83,200 | | align="right" | 83,200 | ||
| align="right" | 2,930 | | align="right" | 2,930 | ||
|} | |} | ||
Revision as of 18:16, 12 August 2011
| maximum particles/m³ | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | |||
|---|---|---|---|---|---|
| 352,000 | 83,200 | 2,930 | |||