Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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{|border="1" | cellpadding="5" cellspacing="0 class="wikitable" | {|border="1" | cellpadding="5" cellspacing="0 class="wikitable" | ||
|- | |- | ||
| − | + | | colspan="6" align="center" | '''maximum particles/m³''' | |
|- | |- | ||
| || colspan="2" align="center" | Morning || colspan="2" align="center" | Evening | | || colspan="2" align="center" | Morning || colspan="2" align="center" | Evening | ||
|- | |- | ||
| − | | || ≥0.5 µm|| ≥5 µm || ≥0.5 µm|| ≥5 µm ||Comments | + | | Date || ≥0.5 µm|| ≥5 µm || ≥0.5 µm|| ≥5 µm ||Comments |
|- | |- | ||
|Goal ||352,000 || 2,930 || 352,000 || 2,930 || | |Goal ||352,000 || 2,930 || 352,000 || 2,930 || | ||
Revision as of 14:36, 25 August 2011
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
| Clas | maximum particles/m³ | ||||
| ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
|---|---|---|---|---|---|
| ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 | |
The clean room using the same above particle counts.
The Physics clean room is about 200
| Clas | Counts | ||||
| ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
|---|---|---|---|---|---|
| ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO-7 | 10,000 | 70,400,000 | 83,200 | 2,930 | |
The average and SD are calculated by taking 5 minute measurements 5 times.
| Date | Counts | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 79,400,000 | 16,640,000 | 586,000 | |||
| 8/11/11 | 6040 2532 | 914 491 | 33 34 | |||
Measurements in ISO mode
| Date | maximum particles/m³ | ||
| ≥0.5 µm | ≥5 µm | comment | |
| Goal | 352,000 | 2,930 | |
| 8/12/11 | 1,480 | 0 | |
| 8/16/11 | 12,100 | 1,700 | drapes have been open over weekend (painting floor) |
| 8/21/11 | 4,240 | 283 | |
Measurements in Single mode
| maximum particles/m³ | |||||
| Morning | Evening | ||||
| Date | ≥0.5 µm | ≥5 µm | ≥0.5 µm | ≥5 µm | Comments |
| Goal | 352,000 | 2,930 | 352,000 | 2,930 | |
| 8/21/11 | 6,990 | 353 | 25,000 | 3,880 | |
| 8/22/11 | 33,400 | 3,770 | 35,800 | 3,770 | |
| 8/23/11 | 9,300 | 353 | 38,100 | 3,770 | |
| 8/24/11 | 19,100 | 824 | |||