Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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|8/22/11 || 33,400 || 3,770|| 35,800 || 3,770 || | |8/22/11 || 33,400 || 3,770|| 35,800 || 3,770 || | ||
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− | |8/23/11 || 9300 || 353 || || || | + | |8/23/11 || 9300 || 353 || 38100 || 3770 || |
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Revision as of 22:12, 24 August 2011
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
Clas | maximum particles/m³ | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 |
The clean room using the same above particle counts.
The Physics clean room is about 200
Clas | Counts | ||||
ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
---|---|---|---|---|---|
ISO-6 | 1,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO-7 | 10,000 | 70,400,000 | 83,200 | 2,930 |
The average and SD are calculated by taking 5 minute measurements 5 times.
Date | Counts | |||||
≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
---|---|---|---|---|---|---|
Goal | 79,400,000 | 16,640,000 | 586,000 | |||
8/11/11 | 6040 | 2532914 | 49133 | 34
Measurements in ISO mode
Date | maximum particles/m³ | ||
≥0.5 µm | ≥5 µm | comment | |
Goal | 352,000 | 2,930 | |
8/12/11 | 1,480 | 0 | |
8/16/11 | 12,100 | 1,700 | drapes have been open over weekend (painting floor) |
8/21/11 | 4,240 | 283 |
Measurements in Single mode
Date | maximum particles/m³ | ||||
Morning | Evening | ||||
≥0.5 µm | ≥5 µm | ≥0.5 µm | ≥5 µm | comment | |
Goal | 352,000 | 2,930 | 352,000 | 2,930 | |
8/21/11 | 6,990 | 353 | 25,000 | 3,880 | |
8/22/11 | 33,400 | 3,770 | 35,800 | 3,770 | |
8/23/11 | 9300 | 353 | 38100 | 3770 |