Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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| Line 7: | Line 7: | ||
| colspan="2" | CLAS|| colspan="4" align="center" | '''maximum particles/m³''' | | colspan="2" | CLAS|| colspan="4" align="center" | '''maximum particles/m³''' | ||
|- | |- | ||
| − | | || | + | | ISO-146441||Federal Standard 209E |
! ≥0.3 µm | ! ≥0.3 µm | ||
! ≥0.5 µm | ! ≥0.5 µm | ||
Revision as of 18:41, 12 August 2011
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
| CLAS | maximum particles/m³ | ||||
| ISO-146441 | Federal Standard 209E | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm |
|---|---|---|---|---|---|
| ISO-6 | 1,000 | 352,000 | 83,200 | 2,930 | |
| ISO-7 | 10,000 | 352,000 | 83,200 | 2,930 | |
The clean room using the same above particle counts.
The Physics clean room is about 200
| Date | Counts | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 79,400,000 | 16,640,000 | 586,000 | |||
| 8/11/11 | 6040 2532 | 914 491 | 33 34 | |||