Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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| − | + | According to http://www.set3.com/standards.html | |
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| + | Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441. | ||
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! | ! | ||
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! ≥0.5 µm | ! ≥0.5 µm | ||
| + | ! ≥1 µm | ||
! ≥5 µm | ! ≥5 µm | ||
|- | |- | ||
|Goal || align="right" | 352,000 || align="right" | 83,200 || align="right" | 2,930 | |Goal || align="right" | 352,000 || align="right" | 83,200 || align="right" | 2,930 | ||
|} | |} | ||
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| + | The clean room using the same above particle counts. | ||
| + | |||
The Physics clean room is about 200 <math>m^3</math> | The Physics clean room is about 200 <math>m^3</math> | ||
Revision as of 18:37, 12 August 2011
According to http://www.set3.com/standards.html
Originally Federal Standard 209E defined a class 10,000 clean room based on the particle counts given below. A class 10,000 clean room is currently defined as an ISO 7 clean room using the ISO standard 146441.
| Date | maximum particles/m³ | |||||
| ≥0.5 µm | ≥1 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 352,000 | 83,200 | 2,930 | |||
The clean room using the same above particle counts.
The Physics clean room is about 200
| Date | Counts | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 79,400,000 | 16,640,000 | 586,000 | |||
| 8/11/11 | 6040 2532 | 914 491 | 33 34 | |||