Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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The definition of a Class 10,000 clean room according to | The definition of a Class 10,000 clean room according to | ||
− | + | Federal Standard 209E, which has been recently replaced with ISO-146441 is | |
− | is | ||
Revision as of 18:29, 12 August 2011
The definition of a Class 10,000 clean room according to Federal Standard 209E, which has been recently replaced with ISO-146441 is
Date | maximum particles/m³ | |||||
≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
---|---|---|---|---|---|---|
Goal | 352,000 | 83,200 | 2,930 |
The Physics clean room is about 200
Date | Counts | |||||
≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
---|---|---|---|---|---|---|
Goal | 79,400,000 | 16,640,000 | 586,000 | |||
8/11/11 | 6040 | 2532914 | 49133 | 34