Difference between revisions of "PhysicsCleanRoomParticleCountLog"

Revision as of 18:27, 12 August 2011

The definition of a Class 10,000 clean room according to

is

	≥0.3 µm	≥0.5 µm	≥5 µm
Date	maximum particles/m³
Goal	352,000	83,200	2,930

The Physics clean room is about 200 [math]m^3[/math]

@@ Line 1: / Line 1: @@
+The definition of a Class 10,000 clean room according to
+is
 {|border="1"  | cellpadding="20" cellspacing="0  class="wikitable"
 |-
@@ Line 10: / Line 15: @@
 |Goal || align="right" | 352,000 || align="right" | 83,200 || align="right" | 2,930
 |}
+The Physics clean room is about 200 <math>m^3</math>
 {|border="1"  | cellpadding="20" cellspacing="0  class="wikitable"
@@ Line 20: / Line 27: @@
 ! ≥5&nbsp;µm
 |-
-|Goal || align="right" | 35,200,000 || align="right" | 8,320,000 || align="right" | 293,000
+|Goal || align="right" | 79,400,000 || align="right" | 16,640,000 || align="right" | 586,000
 |-
 |8/11/11 || align="right" | 6040 <math>\pm</math> 2532 || align="right" | 914 <math>\pm</math> 491 || align="right" | 33<math>\pm</math> 34
 |}