Difference between revisions of "PhysicsCleanRoomParticleCountLog"
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| Line 8: | Line 8: | ||
! ≥5 µm | ! ≥5 µm | ||
|- | |- | ||
| − | |Goal | + | |Goal | align="right" | 352,000 | align="right" | 83,200 | align="right" | 2,930 |
| − | | align="right" | 352,000 | ||
| − | | align="right" | 83,200 | ||
| − | | align="right" | 2,930 | ||
|} | |} | ||
Revision as of 18:18, 12 August 2011
| Date | maximum particles/m³ | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| align="right" | 352,000 | align="right" | 83,200 | align="right" | 2,930 | ||||||