Difference between revisions of "PhysicsCleanRoomParticleCountLog"
Jump to navigation
Jump to search
| Line 3: | Line 3: | ||
| Date|| colspan="6" align="center" | '''maximum particles/m³''' | | Date|| colspan="6" align="center" | '''maximum particles/m³''' | ||
|- | |- | ||
| + | ! | ||
! ≥0.3 µm | ! ≥0.3 µm | ||
! ≥0.5 µm | ! ≥0.5 µm | ||
! ≥5 µm | ! ≥5 µm | ||
|- | |- | ||
| + | |Goal | ||
| align="right" | 352,000 | | align="right" | 352,000 | ||
| align="right" | 83,200 | | align="right" | 83,200 | ||
| align="right" | 2,930 | | align="right" | 2,930 | ||
|} | |} | ||
Revision as of 18:18, 12 August 2011
| Date | maximum particles/m³ | |||||
| ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||||
|---|---|---|---|---|---|---|
| Goal | 352,000 | 83,200 | 2,930 | |||